FESEM

                                                                     MACHINE FEATURES

Constructor

TESCAN

Model

MIRA3 XMH

Electron gun

High Brightness Schottky Emitter

Resolution in high vacuum mode

- In beam SE: 1,0 nm @30 keV - 1,2 nm @15keV - 3,5 nm @1 keV

- In chamber SE: 1,2 nm @30 keV - 1,5 nm @15keV - 4,5 nm @1 keV

Magnifiction

1X - 1000000X

Field of view

6.4 mm at WD_analytical* 10 mm, 20 mm at WD_analytical 30 mm 

Accelerating / landing voltage

0,2 kV to 30 kV

Probe current

2 pA to 200 nA

Scanning speed

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Vacuum system

- High vacuum in chamber: <9 x10^-3 Pa

- Gun vacuum: <3 x10^-7 Pa

Chamber specifications

- Internal size: 290 mm (width) × 340 mm (depth)

- Door: 290 mm (width) × 322 mm (height)

- Number of ports: 12+

- Pneumatic vibration isolation system

Specimen stage

- Moviments: 5-axis fully motorized

- Type: compucentric

- Minimum step: 100 nm

- Max. height of specimen: 106 mm with rotation stage, 147 mm without rotation stage

- Max. weight: 8 kg

Dectectors

- Secondary Electrons (SE)

- Back Scattered Electrons (BSE)

- In beam SE

Microanalysis 

EDX, EBSD